File:B-pab-plasmareactorlpplasmaactivation.png
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| Description |
English: Scheme of a plasma reactor for low pressure plasma activated bonding |
| Source | D. Wünsch and B. Müller and M. Wiemer and T. Gessner and H. Mischke, Aktivierung mittels Niederdruckplasma zur Herstellung von Si-Verbunden im Niedertemperatur-Bereich und deren Charakterisierung mittels Mikro-Chevron-Test (2010) |
| Author | Fraunhofer ENAS, D. Neumann |
| Permission (Reusing this file) |
   This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license. Attribution: Fraunhofer ENAS
|
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 08:57, 11 April 2011 | | 689 × 404 (13 KB) | Enaswiki | Improved plasma area |
| 11:43, 10 April 2011 |  | 689 × 404 (13 KB) | Enaswiki | {{Information |Description ={{en|1=Scheme of a plasma reactor for low pressure plasma activated bonding}} |Source ={{own}} |Author =Enaswiki |Date = |Permission ={{cc-by-sa-3.0-de|Fraunhofer ENAS}} |other |
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