File:LELE challenge.png
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Summary
| Description | The challenge of litho-etch patterning is the combination of overlay error and CD control from successive exposures. |
| Date | |
| Source | PowerPoint drawing |
| Author | Guiding light |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Attribution: Guiding light at English Wikipedia
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-08-03 13:01:42 | 472 × 353 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 15:59, 2 April 2020 | | 472 × 353 (5 KB) | Hippymoose17 | Transferred from en.wikipedia (MTC!) (1.1.0) |
File usage
The following pages on the English Wikipedia use this file (pages on other projects are not listed):
