Burn-Jeng Lin

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Burn-Jeng Lin (Chinese: 林本堅; born 1942) is a Taiwanese electrical engineer.

Education[edit]

After graduating from National Taiwan University in 1963 with a degree in electrical engineering, Lin earned his doctorate in the same subject from Ohio State University in 1970.[1][2]

Career[edit]

During his tenure at IBM, which began in 1970,[3] Lin became the first to propose immersion lithography, a technique that became viable in the 1980s.[4][5] Lin left IBM to found his own company, Linnovation, Inc., in 1992. He began working for TSMC in 2000.[6] Lin was named an IEEE Fellow in 2003, and granted an equivalent honor by the SPIE. The next year, SPIE gave Lin the inaugural Frits Zernike Award.[7] In 2008, Lin was elected to membership of the United States National Academy of Engineering "for technical innovations and leadership in the development of lithography for semiconductor manufacturing."[8] Lin received the IEEE Cledo Brunetti Award and IEEE Jun-ichi Nishizawa Medal in 2009 and 2013 respectively.[2][5] In 2014, Lin was named a member of Academia Sinica.[1][7] Upon his retirement from TSMC, he was offered a position on the faculty of National Tsing Hua University.[7][9]

References[edit]

  1. ^ a b "Burn J. Lin". Academia Sinica. Retrieved 13 February 2023.
  2. ^ a b "ECE Alum Burn Lin receives IEEE Jun-ichi Nishizawa Medal". Ohio State University. 30 April 2013. Retrieved 2 December 2018.
  3. ^ "Burn Lin: The 2023 SPIE Mozi Award". spie.org. Retrieved 2023-05-06.
  4. ^ Burn J. Lin (1987). "The future of subhalf-micrometer optical lithography". Microelectronic Engineering 6, 31–51
  5. ^ a b Handy, Jim (26 June 2013). "Father of Immersion Litho Receives Award". Forbes. Retrieved 2 December 2018.
  6. ^ "Biography: Burn J. Lin". Semiconductor Research Corporation. Retrieved 2 December 2018.
  7. ^ a b c "Semiconductor Pioneer Burn Lin Joins NTHU". National Tsing Hua University. 2016. Archived from the original on 3 December 2018. Retrieved 2 December 2018.
  8. ^ "Dr. Burn Jeng Lin". United States National Academy of Engineering. Retrieved 2 December 2018.
  9. ^ "TSMC Burn Lin Academic Salon". 2016. Archived from the original on 3 December 2018. Retrieved 2 December 2018.
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